发明名称 |
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
摘要 |
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials. |
申请公布号 |
CA2811750(A1) |
申请公布日期 |
2012.03.01 |
申请号 |
CA20112811750 |
申请日期 |
2011.08.23 |
申请人 |
EXOGENESIS CORPORATION |
发明人 |
KIRKPATRICK, SEAN R.;KIRKPATRICK, ALLEN R. |
分类号 |
B01D59/00 |
主分类号 |
B01D59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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