| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a rising characteristic of an amplified laser beam by easily controlling a supply state of pump power and an output state of a seed laser beam. <P>SOLUTION: In an laser emission method, pump power PB is supplied with a reference amount to be an output amount of an amplified laser beam AB performing processing treatment in a steady state after a start of the processing treatment. The laser emission method sequentially performs: a waiting time supply step of supplying the pump power PB so that the pump power PB is smaller than the reference amount and an object is not subjected to the processing treatment by the amplified laser beam AB, during a period of continuous oscillation output of a seed laser beam SB; a treatment start time supply step of supplying the pump power PB so that the pump power PB is larger than the reference amount when the processing treatment starts; and a treating time supply step of supplying the pump power PB equal to the reference amount in the steady state after the start of the processing treatment. Thereby a rising characteristic of the amplified laser beam AB can be improved only by controlling the supply amount of the pump power PB. <P>COPYRIGHT: (C)2012,JPO&INPIT |
