| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a driving axis control method in a normal vector tracking type super-precision shape measurement apparatus that shortens a measurement time at each measurement point by deriving a surface shape of a body to be measured from coordinates of the measurement points and a measured value of a normal vector, and devising a control method for respective axes, and thereby measuring the surface shape of the body to be measured faster with higher precision. <P>SOLUTION: While one biaxial goniometer and a uniaxial rectilinear propagation stage among two biaxial goniometers and the uniaxial rectilinear propagation stage are brought under full-closed feedback control (follow-up control) in which output from QPD is input directly to an axis driving motor, the remaining one biaxial goniometer is brought under semi-closed feedback control (fixed value control), encoder outputs of respective axes and the QPD output are acquired simultaneously, and measurement point coordinates derived from the encoder outputs and the normal vector are corrected with the QPD output to exclude an influence of a steady-state deviation of a goniometer control system. <P>COPYRIGHT: (C)2012,JPO&INPIT |
