| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus which is capable of removing foreign matter from an optical surface of an optical member by making a cleaning medium collide with the optical surface, and to provide an exposure apparatus, a cleaning method, an exposure method, and a method for manufacturing a device. <P>SOLUTION: The cleaning apparatus includes: an environment formation member 61 which is disposed opposite to at least a part of the optical surface of the optical member to form a cleaning space separated from an environment in a chamber; a cleaning medium spraying part 70 for spraying a cleaning medium on at least a part of the optical surface in the cleaning space; and a recovering part 72 for recovering the cleaning medium sprayed on the at least a part of the optical surface, and foreign matter removed from at least a part of the optical surface by the cleaning medium. <P>COPYRIGHT: (C)2012,JPO&INPIT |
