| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate support device which supports a circuit substrate flatly and reduces the pressing force acting on components mounted on a lower surface of the circuit substrate. <P>SOLUTION: A substrate support device 1 includes a support member 10 having multiple cylinders 21 and support pins 40 respectively inserted into the cylinders 21 so as to move up and down. The substrate support device 1 supports a circuit substrate 2 from the side of a lower surface 2b with the support pins 40 protruding from an upper surface of the support member 10. An enlarged diameter portion, in which a base part of each support pin 40 is housed, and a reduced diameter portion, in which a shaft part on a tip side of each support pin 40 is inserted, are formed in each cylinder 21. An airway passing through from an upper surface to a lower surface is formed in the base part of each support pin 40. When the base part of the support pin 40 is in contact with a boundary surface between the enlarged diameter portion and the reduced diameter portion, an upper end part of the airway is covered by the boundary surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
