| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology to connect objects to be connected each other in a vacuum chamber. <P>SOLUTION: In the connection method, the objects to be connected are connected each other by forming a connecting surface of the object to be connected which is surface-activated with a metal film by sputtering a metal onto at least one of the objects to be connected in the vacuum chamber to form the metal film, when the objects to be connected having the surface-activated connecting surfaces are to be connected each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
