发明名称 STRUCTURE MANUFACTURING METHOD AND STRUCTURE
摘要 A structure manufacturing method includes laminating a first film on a base material, selectively irradiating the first film with an energy ray depending on a position of a surface of the first film on the base material, to form a latent image of a pattern on the first film, laminating a second film on the surface of the first film, and supplying a developer to the second film and removing a removal target portion of the first film to be selectively removed along with the second film, thereby developing the pattern.
申请公布号 US2012052260(A1) 申请公布日期 2012.03.01
申请号 US201113212520 申请日期 2011.08.18
申请人 MASUHARA SHIN;SONY CORPORATION 发明人 MASUHARA SHIN
分类号 B32B3/00;G03F7/20 主分类号 B32B3/00
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