发明名称 |
COMPOSITION FOR OXIDE THIN FILM, METHOD OF PREPARING THE COMPOSITION, METHOD OF FORMING THE OXIDE THIN FILM, AND ELECTRONIC DEVICE USING THE COMPOSITION |
摘要 |
Provided are a composition for an oxide semiconductor, a method of preparing the composition, methods of forming an oxide semiconductor thin film and an electronic device using the composition. The composition for an oxide semiconductor includes a tin compound, a zinc compound, and a low electronegativity metal compound containing a metal with an electronegativity lower than zinc.
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申请公布号 |
US2012049181(A1) |
申请公布日期 |
2012.03.01 |
申请号 |
US201113114353 |
申请日期 |
2011.05.24 |
申请人 |
KIM HYUN JAE;RIM YOU SEUNG;KIM DONG LIM;INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
KIM HYUN JAE;RIM YOU SEUNG;KIM DONG LIM |
分类号 |
H01L29/12;H01B1/02;H01B1/22 |
主分类号 |
H01L29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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