发明名称 |
CHARGED-PARTICLE BEAM IRRADIATION DEVICE, CHARGED-PARTICLE BEAM IRRADIATION METHOD, AND COMPUTER READABLE MEDIUM |
摘要 |
A charged-particle beam irradiation device, which irradiates an object to be irradiated with a charged-particle beam, includes a scanning member that scans the object to be irradiated with the charged-particle beam; an irradiation amount setting unit that sets an irradiation amount of the charged-particle beam at a plurality of target scanning positions on a scanning line of the charged-particle beam with which the scanning member scans the object to be irradiated; and a scanning speed setting unit that sets a target scanning speed of the charged-particle beam at each of the target scanning positions on the basis of the irradiation amount set by the irradiation amount setting unit. |
申请公布号 |
US2012049091(A1) |
申请公布日期 |
2012.03.01 |
申请号 |
US201113207521 |
申请日期 |
2011.08.11 |
申请人 |
TACHIBANA MASANORI;SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
TACHIBANA MASANORI |
分类号 |
G21K5/00 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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