| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflection optical system that can correct a plurality of wavelength ranges sufficiently and reduce thermal sensitivity without vignette. <P>SOLUTION: A reflection optical system 10 for forming an image in a first image plane IP in an object in an object space in at least one wavelength range includes: a first mirror M1, a second mirror M2, and a third mirror M3 which are arranged in configuration of a three-mirror aberration correction, respectively include a first reflection surface MS1, a second reflection surface MS2, and a third reflection surface MS3, and reflect light from the object on the image in order of the first reflection surface, the second reflection surface, and the third reflection surface; and at least one intermediate image position which is arranged between the first mirror and the third mirror, and in which at least one intermediate image IIM is formed. At least one of the first reflection surface, the second reflection surface, and the third reflection surface is non-rotation symmetrical. <P>COPYRIGHT: (C)2012,JPO&INPIT |
