| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser ablation device which allows active particles generated from a target to reach a precursor efficiently. <P>SOLUTION: In the laser ablation device 1, a surrounding member 8, provided with a particle entrance 11 which active particles A enter, surrounds a precursor P, a support base 6 and a heater 7 in a chamber 2. Thereby, even if active particles A generated from a target T adhere to an inner surface of the chamber 2, the re-evaporation of the particles, by heat of the heater 7 and the radiation heat from the heated precursor P and the support base 6, is suppressed. Further, the evaporation of the target T by the heat is also suppressed. Then, even if inert particles are generated by the re-evaporation, the generated inert particles hardly reach the precursor P due to the blocking by the surrounding member 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
