PEELING APPARATUS, PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM

摘要

A peeling apparatus, for peeling a superimposed substrate to obtain a substrate to be processed and a support substrate, comprises: a first holding section that is provided with a heating mechanism for heating the substrate to be processed, and that holds the substrate to be processed; a second holding section that is provided with a heating mechanism for heating the support substrate, and that holds the support substrate; and a moving mechanism that holds an outer circumference section of the second holding section and moves the same in the vertical direction, so that the support substrate held by the second holding section will peel off successively from the substrate to be processed held by the first holding section, from the outer circumference section side thereof towards the center section side thereof.