<p>A transfer device that has two arm units (20L1 and 20R1), each provided with a hand having a simple shape, and can simultaneously transfer two substrates at the same height. Each arm unit has: a primary active arm (21L1 or 21R1) that rotates about a primary active rotation axis (O); a secondary active arm (23L1 or 23R1) that rotates about a secondary active rotation axis (SL or SR) that passes through the tip of that primary active arm; and a hand (26L1 or 26R1) that rotates about a hand active rotation axis (PL or PR) that passes through the tip of that secondary active arm. Placement parts (27L1 and 27R1) are disposed at the same height as each other. Each arm unit has the same primary active rotation axis (O). Each placement part is disposed at a separation from the central axis of the arm unit on which said placement part is provided. For each arm unit, the line segment that connects that secondary active rotation axis (SL or SR) with that hand active rotation axis (PL or PR) is made shorter than the line segments that connect the primary active rotation axis (O) with the secondary active rotation axes (SL and SR).</p>
