| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hole closing method for a metal film capable of easily closing a hole even if it occurs in a thin metal film, and to provide the metal film with the hole closed by the hole closing method. <P>SOLUTION: A hole closing method for a metal film includes: a coating formation step of supplying a dispersion comprising a dispersoid, which is at least one of a metal powder containing a first metallic element (titanium or the like) and a metal compound powder (metallic oxide powder or the like), and a dispersant (ethanol or the like) to the hole in the metal film containing a second metallic element (titanium or the like) and to the periphery of the hole to form a coating; and a hole closing step of heating (by laser radiation or the like) the coating to melt the dispersoid and then solidifying the dispersoid to close the hole. The metal film, where the hole is filled with a cured dispersoid to be closed by the hole closing method, is also provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
