| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro pump capable of suppressing vibration and electric noise upon driving and attaining reduction in size and weight. <P>SOLUTION: The micro pump 100 includes an actuator 10 having a deformation part whose volume is expanded or contracted by a temperature change, a liquid supply part 11 supplying liquid to the actuator 10, a first check valve 12 provided between the actuator 10 and the liquid supply part 11, a liquid conveying pipe 14 supplying the liquid from the actuator 10, and a second check valve 13 provided between the actuator 10 and the liquid conveying pipe 14. <P>COPYRIGHT: (C)2012,JPO&INPIT |
