| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate detector in which the number of components is reduced. <P>SOLUTION: The flow-rate detector for detecting the flow rate of a fluid in a pipe comprises: a sensor chip made of a piezoelectric material and provided in a valve; and a processing means for supplying a drive signal to the sensor chip and processing a detection signal of the sensor chip. The sensor chip has, on a sensor surface exposed to a fluid: an acoustic wave portion for generating a surface acoustic wave upon reception of a drive signal and converting the surface acoustic wave into a detection signal; a reflecting section for reflecting a surface acoustic wave, generated by the acoustic wave section, to the acoustic wave section; and an internal communicating section for receiving a drive signal and also transmitting a detection signal. The processing section has: a generating section for generating a drive signal; an external communicating section for transmitting a drive signal and also receiving a detection signal; and a calculating section for calculating the pressure and temperature of a fluid and the degree to which the valve is opened, and the flow rate of the fluid, based on the drive signal and detection signal. <P>COPYRIGHT: (C)2012,JPO&INPIT |
