METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
摘要
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.
申请公布号
WO2012027330(A1)
申请公布日期
2012.03.01
申请号
WO2011US48754
申请日期
2011.08.23
申请人
EXOGENESIS CORPORATION;KIRKPATRICK, SEAN, R.;KIRKPATRICK, ALLEN, R.
