| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conveying apparatus and a conveying method by which even when a pressing body is brought into contact with the adhesion part of a workpiece and the workpiece is pressed to a table, the workpiece stuck to a pressing body can be smoothly peeled off and can be conveyed, thereafter. <P>SOLUTION: The conveying apparatus includes the table 12 which has a recessed part 18 where the workpiece 1 having the adhesion part 2 is housed with the adhesion part 2 directed upward, the pressing body 32 which is brought into contact with the adhesion part 2 of the workpiece 1 housed in the recessed part 18 to press the workpiece 1 to the table 12, and moving mechanisms 14, 60 which relatively move the table 12 and the pressing body 32. The moving mechanisms 14, 60 move the table 12 and the pressing body 32 relatively in a horizontal direction in a state where pressing of the workpiece 1 by the pressing body 32 is released and at least a part of the workpiece 1 in a vertical direction is housed in the recessed part 18. <P>COPYRIGHT: (C)2012,JPO&INPIT |
