PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM

摘要

A peeling station of a peeling system comprises: a peeling apparatus for peeling a superimposed substrate; a first washing apparatus for washing a substrate to be processed that was peeled off; a second conveying apparatus for conveying the substrate to be processed between the peeling apparatus and the first washing apparatus; and a second washing apparatus for washing a support substrate that was peeled off. The second conveying apparatus comprises: a support plate that supports a joining face of the substrate to be processed, and upon which is formed a supply opening for supplying washing liquid to the joining face of the substrate to be processed; a holding member for holding a non-joining face of the substrate to be processed; and a reversing mechanism for reversing the front/back faces of the support substrate, and the substrate to be processed supported by the holding member.