| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent degradation of characteristics of a metal film serving as an optical film due to, e.g., oxidation and sulfuration. <P>SOLUTION: An optical filter includes a first substrate 20, a second substrate 30 positioned opposite to the first substrate 20, a first optical film 40 provided on the first substrate 20, and a second optical film 50 provided on the second substrate 30 and facing the first optical film 40. At least one of the first optical film 40 and the second optical film 50 includes a metal film 40M having reflection and transmission characteristics for light of a desired wavelength band. The surface and the edge part of the metal film 40M are covered with a dielectric film serving as a barrier film 90. An inclined plane can be provided on the edge part of the metal film 40M. Further, a step can be formed between the metal film 40M and a dielectric film 40E which is another optical film formed under the metal film 40M. <P>COPYRIGHT: (C)2012,JPO&INPIT |
