REACTOR BOX CHAMBER CLEANING USING MOLECULAR FLUORINE

摘要

Methods and apparatus for the cleaning reactor box chambers using molecular fluorine as the cleaning material. The molecular fluorine is dissociated in-situ in the chamber using the chamber RF power source. An exemplary method for of cleaning a reactor box chamber may comprise the steps: introducing molecular fluorine to the chamber; dissociating the molecular fluorine to create fluorine radicals; allowing the fluorine radicals to react with unwanted deposits in the chamber; and removing the resultant gas from the chamber.