发明名称 SHEET ADHERING DEVICE AND ADHERING METHOD
摘要 This sheet adhering device (1), which adheres an adhesive sheet (MS) adhered ahead of time to the opening of a frame (RF) and having a size that protrudes beyond the outer edge of an adherend (W), is provided with: pressing means (8A, 8B) that press and adhere the adhesive sheet (MS) to the adherend (W); and a slackness-eliminating means (4) that eliminates slackness at the portion of the adhesive sheet adhered by the pressing means (8A, 8B) that protrudes beyond the outer edge of the adherend (W).
申请公布号 WO2012026275(A1) 申请公布日期 2012.03.01
申请号 WO2011JP67212 申请日期 2011.07.28
申请人 LINTEC CORPORATION;TAKANO TAKESHI 发明人 TAKANO TAKESHI
分类号 H01L21/683 主分类号 H01L21/683
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