| 摘要 |
<P>PROBLEM TO BE SOLVED: To generate a connection image of good precision even with a monotonous pattern using design data as a restriction condition, and to generate a connection image of good precision at a high speed by roughly finding a reference position by matching between the design data and image data, and performing matching between adjacent images based upon an amount of deviation from the design data as a retrieval range. <P>SOLUTION: An image generation method is adapted to inspect an electronic device pattern using a scanning electron microscope, and comprises a design data file in which design data describing layout information on the electronic device pattern is input and stored, a plurality of divided image data obtained by imaging the electronic device pattern at different imaging positions, and image connection means of connecting the plurality of divided image data into one image using the plurality of divided image data and the design data of the design data file. <P>COPYRIGHT: (C)2012,JPO&INPIT |
