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发明名称
METHOD FOR PREPARING A GERMANIUM LAYER FROM AN SILICON-GERMANIUM ON-INSULATOR SUBSTRATE
摘要
申请公布号
EP2109884(B1)
申请公布日期
2012.02.29
申请号
EP20080716770
申请日期
2008.02.07
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;STMICROELECTRONICS (CROLLES 2) SAS
发明人
VINCENT, BENJAMIN;DAMLENCOURT, JEAN-FRANCOIS;MORAND, YVES
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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