发明名称 |
PIEZOELECTRIC DRIVE AND MICROVALVE COMPRISING SAID DRIVE |
摘要 |
The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive. |
申请公布号 |
EP2422380(A1) |
申请公布日期 |
2012.02.29 |
申请号 |
EP20100716807 |
申请日期 |
2010.04.20 |
申请人 |
LACHNER, HUBERT;FOERG, MICHAEL |
发明人 |
SCHWESINGER, NORBERT;POBERING, SEBASTIAN;ZAEHRINGER, SANDY |
分类号 |
H01L41/047;F16K31/00;H01L41/09 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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