发明名称 CURABLE COMPOSITION FOR IMPRINT,PATTERNING METHOD AND PATTERN
摘要 <p>A curable composition for imprints, which is excellent in patternability and in line edge roughness, is provided. The curable composition for imprints comprises at least one kind of polymerizable monomer (A) and at least one kind of photopolymerization initiator (B). The polymerizable monomer (A) comprises at least two fluorine-containing groups selected from a fluoroalkyl group and a fluoroalkylether group and each of two of the fluorine-containing groups is connected with each other through a linking group having at least two carbon atoms.</p>
申请公布号 EP2268680(A4) 申请公布日期 2012.02.29
申请号 EP20100750937 申请日期 2010.03.08
申请人 FUJIFILM CORPORATION 发明人 KODAMA, KUNIHIKO
分类号 C08F20/22;B29C59/02;H01L21/027 主分类号 C08F20/22
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