发明名称 |
Method and Apparatus for Fabricating Flat Panel Display |
摘要 |
Fabricating a flat panel display device involves coating an etch-resist (33a) on a thin film (32a); forming a soft mold (34) having a groove (34a) and a protrusion (34b) for patterning the thin film; treating an end surface of the protrusion; applying the soft mold to the etch-resist to form an etch-resist pattern (33b); separating the soft mold from the pattern; and etching the thin film by using the pattern to form a thin film pattern (32b). - An INDEPENDENT CLAIM is also included for an apparatus for fabricating the flat panel display device. |
申请公布号 |
KR101117437(B1) |
申请公布日期 |
2012.02.29 |
申请号 |
KR20030098122 |
申请日期 |
2003.12.27 |
申请人 |
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发明人 |
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分类号 |
G02F1/13;C30B33/00;G02F1/133;G02F1/1362;G02F1/1368;G03F7/00;G03F7/20;G09F9/00;G09F9/30;H01J9/24;H01L21/00;H01L21/027;H01L21/3105;H01L21/3213;H01L21/70;H01L21/768 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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