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经营范围
发明名称
Beam Processing Apparatus
摘要
申请公布号
EP1983549(B1)
申请公布日期
2012.02.29
申请号
EP20080154832
申请日期
2008.04.18
申请人
SEN CORPORATION, AN SHI AND AXCELIS COMPANY
发明人
TSUKIHARA, MITSUKUNI;KABASAWA, MITSUAKI;MATSUSHITA, HIROSHI;YAGITA, TAKANORI;AMANO, YOSHITAKA;FUJII, YOSHITO
分类号
H01J37/147;H01J37/317
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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