D'arsonval movement mems accelerometer

摘要

Microelectromechanical (MEMS) accelerometer (40) and acceleration sensing methods. A MEMS accelerometer includes a housing (44), a proof mass (42) suspended within the housing by at least one torsional flexure (46-52), and a torsional magnetic rebalancing component (60, 66). In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.