发明名称 Nanowire based gas ionization sensor
摘要 Gas ionization sensor comprising at least one sensing element on a substrate. The sensing element comprises: at least one nanowire; a counter electrode which surrounds the nanowire, the surrounding electrode being electrically isolated from the nanowire and being at a predetermined gap from the nanowire, the gap allowing penetration of a gas or a gas mixture between the nanowire and the surrounding electrode; a voltage source electrically connected between the nanowire and the surrounding electrode for providing a voltage difference between the nanowire and the surrounding electrode; and measurement circuitry for measuring a breakdown voltage and/or an electrical discharge current and/or a prebreakdown current through the gap.
申请公布号 EP2423680(A1) 申请公布日期 2012.02.29
申请号 EP20110178352 申请日期 2011.08.22
申请人 STICHTING IMEC NEDERLAND 发明人 OFFERMANS, PETER
分类号 G01N27/62;G01N27/68;G01N27/70;G01N30/64 主分类号 G01N27/62
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