| 摘要 |
PURPOSE: A solar cell and a manufacturing method thereof are provided to simplify a manufacturing process by including a hydrogenated amorphous carbon thin film which functions as an anti-reflection layer and a front electrode. CONSTITUTION: A first conductive crystalline silicon substrate(101) is prepared. A second conductive semiconductor layer(103) is formed on the substrate. Source gas of an amorphous carbon thin film and source gas of an impurity ion are injected. A hydrogenated amorphous carbon thin film(104) doped with impurity ions is formed. The source gas of the amorphous carbon thin film is C3H6 or C2H2. |
