发明名称 |
Method and system for controlling transport sequencing in a process tool by a look-ahead mode |
摘要 |
By providing a look-ahead functionality for a tool internal substrate handling system of process tools on the basis of a process history, the tool internal substrate sequencing may be significantly enhanced. The look-ahead functionality enables a prediction of process time of substrates currently being processed in a respective process module, thereby enabling the initiation of transport activity for substrate load operations in order to significantly reduce the overall idle time of process modules occurring during substrate exchange. |
申请公布号 |
US8126588(B2) |
申请公布日期 |
2012.02.28 |
申请号 |
US20080122075 |
申请日期 |
2008.05.16 |
申请人 |
SCHMIDT KILIAN;BECKER MATTHIAS;ADVANCED MICRO DEVICES, INC. |
发明人 |
SCHMIDT KILIAN;BECKER MATTHIAS |
分类号 |
G06F7/00;G06F19/00 |
主分类号 |
G06F7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|