发明名称 |
Resist composition, method of forming resist pattern, novel compound, and acid generator |
摘要 |
A compound represented by general formula (I); and a compound represented by general formula (b1-1). wherein Q1 represents a divalent linkage group or a single bond; Y1 represents an alkylene group which may have a substituent or a fluorinated alkylene group which may have a substituent; X represents a cyclic group of 3 to 30 carbon atoms which may have a substituent, and has an—SO2—bond in the structure thereof; M+ represents an alkali metal ion; and A+ represents an organic cation.
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申请公布号 |
US8124313(B2) |
申请公布日期 |
2012.02.28 |
申请号 |
US20100692513 |
申请日期 |
2010.01.22 |
申请人 |
SESHIMO TAKEHIRO;UTSUMI YOSHIYUKI;KAWAUE AKIYA;HADA HIDEO;SHIMIZU HIROAKI;NAKAMURA TSUYOSHI;TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SESHIMO TAKEHIRO;UTSUMI YOSHIYUKI;KAWAUE AKIYA;HADA HIDEO;SHIMIZU HIROAKI;NAKAMURA TSUYOSHI |
分类号 |
G03F7/004;C07D327/02 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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