发明名称 Resist composition, method of forming resist pattern, novel compound, and acid generator
摘要 A compound represented by general formula (I); and a compound represented by general formula (b1-1). wherein Q1 represents a divalent linkage group or a single bond; Y1 represents an alkylene group which may have a substituent or a fluorinated alkylene group which may have a substituent; X represents a cyclic group of 3 to 30 carbon atoms which may have a substituent, and has an—SO2—bond in the structure thereof; M+ represents an alkali metal ion; and A+ represents an organic cation.
申请公布号 US8124313(B2) 申请公布日期 2012.02.28
申请号 US20100692513 申请日期 2010.01.22
申请人 SESHIMO TAKEHIRO;UTSUMI YOSHIYUKI;KAWAUE AKIYA;HADA HIDEO;SHIMIZU HIROAKI;NAKAMURA TSUYOSHI;TOKYO OHKA KOGYO CO., LTD. 发明人 SESHIMO TAKEHIRO;UTSUMI YOSHIYUKI;KAWAUE AKIYA;HADA HIDEO;SHIMIZU HIROAKI;NAKAMURA TSUYOSHI
分类号 G03F7/004;C07D327/02 主分类号 G03F7/004
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