| 摘要 |
PURPOSE: An align stage system is provided to minimize an entire size of the system by including a driving device which drives an alignment table in the side of the alignment table. CONSTITUTION: An alignment table(20) is arranged on the upper side of a base frame to be possible to rotate and move to an unspecified direction. A guide rail is installed in three sides of the alignment table. Driving devices(30, 40, 50) are fixed to the base frame. The driving device is arranged in the three sides of the align table and drives the align table to an X-axis direction, a Y-axis direction, and aθ-axis direction. The driving device comprises a roller, a driving rod, and a driving unit. The roller is arranged in the guide rail to be possible to move. |
