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发明名称
Low Temperature methods for forming patterned electrically conductive thin films and patterned articles therefrom
摘要
申请公布号
KR101114783(B1)
申请公布日期
2012.02.27
申请号
KR20087009488
申请日期
2006.09.21
申请人
发明人
分类号
H01L21/20;B82B1/00;B82B3/00;B82Y40/00
主分类号
H01L21/20
代理机构
代理人
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