发明名称 SEMICONDUCTOR OR DIELECTRIC MATERIAL SURFACE METALLISATION METHOD
摘要 FIELD: metallurgy. ^ SUBSTANCE: invention can be used for obtaining heterostructures of micro- and nanoelectronics, high-efficiency catalysts with developed high-porous surface of carrier, as well as for obtaining new nanomaterials. Working gas medium containing volatile metal complex formed with small 2-5-atomic molecules-ligands is pre-formed; it is transferred to the surface subject to metallisation, the action leading to decomposition of metal complex and deposition of metal layer is performed. Formation of working gas medium, synthesis of metal complex and metallisation of the surface is performed in one and the same volume of reactor. For synthesis of volatile metal complex there used are molecules-ligands forming together with metals the ammoniates, carbonyl complexes and their homologs or molecules-ligands contained in short-living free-radical, ionised or excited state. Copper, copper oxide or their mixture is used as disperse filler used for synthesis of metal complex. ^ EFFECT: increasing the efficiency and quality of metallisation, capacity and repeatability of metallisation process; achieving the possibility of metallisation of nanostructures and continuity of application process of two and more layers of various materials, as well as enlarging the range of materials used for metallisation and obtained metallised coatings and the range of materials the surface of which is subject to metallisation. ^ 19 cl, 3 dwg
申请公布号 RU2443799(C2) 申请公布日期 2012.02.27
申请号 RU20100111610 申请日期 2010.03.25
申请人 UCHREZHDENIE ROSSIJSKOJ AKADEMII NAUK INSTITUT FIZIKI POLUPROVODNIKOV IM. A.V. RZHANOVA SIBIRSKOGO OTDELENIJA RAN (IFP SO RAN);UCHREZHDENIE ROSSIJSKOJ AKADEMII NAUK INSTITUT NEORGANICHESKOJ KHIMII IM. A.V. NIKOLAEVA SIBIRSKOGOOTDELENIJA RAN (INKH SO RAN);SIBIRSKOE OTDELENIE MEZHDUNARODNOGO INSTITUTA NELINEJNYKH ISSLEDOVANIJ (SO MINI) 发明人 BADALJAN ARAM MAMIKONOVICH;KASHNIKOV BORIS PETROVICH;POLJAKOV OLEG VASIL'EVICH;PCHELJAKOV OLEG PETROVICH;SMIRNOV GENNADIJ IVANOVICH
分类号 C23C16/18 主分类号 C23C16/18
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