| 摘要 |
FIELD: physics. ^ SUBSTANCE: method of forming an ordered array of nanosized spheroids on a substrate involves transfer of a film substance deposited on the surface of a transparent donor plate onto an acceptor substrate via pulsed laser exposure of the film through the plate, wherein a sacrificial interlayer which evaporates upon exposure, is deposited between said film and plate. ^ EFFECT: high resolution of forming a pattern, possibility of making microstructures with minimum dimensions, much smaller than the wavelength of radiation which initiates the technological process. ^ 5 cl, 3 dwg |
