PURPOSE: An apparatus and a method for processing a substrate are provided to improve a processing efficiency by reducing a time requiring for processing a substrate by processing a target area in a detected substrate. CONSTITUTION: An align unit(20) aligns a substrate to determine the position thereof. The align unit comprises a plurality of support members supporting the both sides of the substrate and also includes a transport unit. The transport unit transfers the support members to be close to each other or separated from each other. A support member(211) pressing the both sides of the substrate is formed in the support member. A detecting unit(30) detects the location of a target region of the substrate. A processing unit processes the target region which is detected by the detection unit.
申请公布号
KR20120016931(A)
申请公布日期
2012.02.27
申请号
KR20100079469
申请日期
2010.08.17
申请人
QMC. INC.
发明人
RYU, BENG SO;JUNG, HONG JIN;LEE, BYONG SHIK;KIM, BUM JOONG;JANG, HYEON SAM;KIM, HARK YONG;KWAK, JONG HO;KIM, YOUNG YONG;HONG, SUN YOUNG