METHOD FOR DEPOSITING OF ULTRA FINE GRAIN POLY SILICON THIN FILM,申请号KR20090037145-传众专利搜索

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发明名称	METHOD FOR DEPOSITING OF ULTRA FINE GRAIN POLY SILICON THIN FILM
摘要
申请公布号	KR101110079(B1)	申请公布日期	2012.02.24
申请号	KR20090037145	申请日期	2009.04.28
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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