| 摘要 |
<p>A machine diagnosing device includes a drive object driving force estimating unit for estimating drive object driving force based on a torque command value toward a servo motor which is acquired using a position command value, an elastic deformation error estimating unit for estimating an elastic deformation error of a ball screw with the drive object driving force, and a positional deviation calculating unit for calculating a positional deviation using a rotation position of the servo motor and the position of a table, and a machine damage diagnosing unit for diagnosing a machine damage by calculating a machine damage coefficient using the elastic deformation error and the positional deviation, comparing the obtained machine damage coefficient with a previously set threshold value, and diagnosing a damage state of the drive object.</p> |
