ALIGNMENT MODULE FOR SUBSTRATE AND LITHOGRAPH APPARATUS HAVING THE ALIGNMENT MODULE

摘要

PURPOSE: A substrate aligning module and a lithography device including the same are provided to maintain the alignment of a substrate by minimizing the misalignment of the substrate and a stamp. CONSTITUTION: A substrate chuck is mounted on a substrate holder. A stamp chuck(21) is formed on the upper side of a substrate and is mounted in a stamp holder. A stage unit(40) is connected to the stamp holder and firstly aligns the substrate and the stamp. A piezoelectric device is connected to the substrate holder and secondly aligns the substrate and the stamp. A spring unit(25) is located at the same height as the contact surface between the substrate and the stamp.