LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

摘要

PURPOSE: A laser processing apparatus and method are provided to reduce the interval between laser spots of a substrate by increasing laser oscillation frequency, thereby improving the speed of laser processing. CONSTITUTION: A laser processing apparatus comprises a light source, a first beam splitter(121), and a path difference generating unit. The light source oscillates a laser beam(L) with a fixed frequency. The first beam splitter divides the laser beam emitted from the light source into first and second laser beams(L1,L2). The path difference generating unit irradiates the first and second laser beams to a substrate with a path difference according to a processing direction.