VERTICAL TYPE VACCUM EFFUSION CELL FOR MANUFACTURING THIN FILM AND VAPER DEPOSITION APPARATUS USING THE SAME

摘要

PURPOSE: A lateral vacuum effusion cell for vacuum production of thin films and a vapor deposition apparatus using the same are provided to effectively apply a vacuum effusion cell to a lateral vapor deposition apparatus because the effusion surface of a source material is oblique to the vertical center line of a crucible. CONSTITUTION: A lateral vacuum effusion cell(100) comprises a crucible(110), a heating unit(120), and an effusion unit(130). The crucible has an inner cavity and an opening(112). The heating unit is arranged adjacent to the crucible. The effusion unit is extended from the opening so that the end face thereof is located on an inclined surface. A first straight component of the inclined surface is at an acute angle to a second linear component of a first surface of the crucible where the opening is located.