| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microphone which can manufacture a high quality microphone of a parallel plate type having a movable electrode and a fixed electrode. <P>SOLUTION: The microphone is of a parallel plate type which has a first electrode and a second electrode formed in opposition to the first electrode via a hollow region and in which the first electrode is provided with an electret film. The method for manufacturing the microphone includes: a first step (S3) of sweeping a bias voltage between the first electrode and the second electrode and, at the same time, measuring a capacity value and the bias voltage between the first electrode and the second electrode; a second step (S4) of calculating a relationship between the sensitivity of the microphone and an amount of charge on the electret film from the results measured in the first step; and a third step (S7) of charging the electret film according to the result calculated in the second step. <P>COPYRIGHT: (C)2012,JPO&INPIT |
