| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new carbon nanotube production method and a new carbon nanotube production apparatus reducible of variation in properties of carbon nanotubes formed on the same carbon nanotube formation surface. <P>SOLUTION: The apparatus comprises: a reaction chamber 30 for holding an object 1; gas supply chambers 51 and 52 that spacedly face to the carbon nanotube formation surfaces 11 and 12 of the object 1 held in the reaction chamber 30 and horizontally extend along the surface direction along which the carbon nanotube formation surfaces 11 and 12 horizontally extend; a gas passage formation member that has a plurality of blow ports 41 and 42 blowing the reaction gas into the reaction chamber 30 and allows the gas supply chambers 51 and 52 and the reaction chamber 30 to communicate with each other; and heating sources 71 and 72. By supplying the reaction gas to the gas supply chambers 51 and 52, the reaction gas in the gas supply chambers 51 and 52 is blown along the direction crossing the surface directions along which the carbon nanotube formation surfaces 11 and 12 of the object 1 in the reaction chamber 30 horizontally extend so as for the reaction gas to collide against the carbon nanotube formation surfaces 11 and 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
