发明名称 |
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
摘要 |
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.
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申请公布号 |
US2012045615(A1) |
申请公布日期 |
2012.02.23 |
申请号 |
US201113215514 |
申请日期 |
2011.08.23 |
申请人 |
KIRKPATRICK SEAN R.;KIRKPATRICK ALLEN R.;EXOGENESIS CORPORATION |
发明人 |
KIRKPATRICK SEAN R.;KIRKPATRICK ALLEN R. |
分类号 |
H01J37/08;B32B3/00;C01B31/06 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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