| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens exposure device in which a microlens array and a mask are fixed at predetermined intervals, which can easily and correctly adjust the gap between the microlens array and an exposure substrate at the focal position of the microlens. <P>SOLUTION: Exposure laser light is delivered onto a resist film 2 through a microlens 3a of a microlens array 3. Light from a microscope 10 transmits through a hole 5b of a Cr film 5 of a mask 4 and is delivered onto the resist film 2 through a microlens 3b. The observation with the microscope 10 to determine whether the light having passed through this microlens 3b is focused on the resist film 2 or not, can determine the focal point of the exposure light converged on the resist film 2 by the microlens 3a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
