发明名称 SHEET PASTING DEVICE AND PASTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet pasting device and a pasting method capable of downsizing a sheet pasting device by reducing the number of its parts and pasting an adhesive sheet without interposing a space between the adhesive sheet and an adherend. <P>SOLUTION: A sheet pasting device comprises: a first case 13 that forms a first space C1 capable of storing an adherend W with an adhesive sheet S disposed at a position facing the adherend W; first pressure control means P1 capable of controlling a pressure of the first space; a second case 12 that forms a second space C2 sealed by an adhesive sheet S on the opposite side of the first space with the adhesive sheet S sandwiched therebetween; second pressure control means P2 capable of controlling a second space C2; and pressing means for pressing the adhesive sheet S against the adherend W. The first pressure control means P1 controls the pressure of the first space C1 and the second pressure control means P2 controls the pressure of the second space C2 to form an initial adhesion part S1 that approximates the central part of the adhesive sheet S mostly to the adherend W by making the pressure of the second space C2 relatively higher than the pressure of the first space C1. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012038879(A) 申请公布日期 2012.02.23
申请号 JP20100177004 申请日期 2010.08.06
申请人 LINTEC CORP 发明人
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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