| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate breaking apparatus capable of accurately positioning a breaking position even when a brittle material substrate to be broken is thin and is broken with a small pitch. <P>SOLUTION: The substrate breaking apparatus includes: an elastic film 4; the upper breaking bars 6a and 6b which are arranged to enable vertical movement above the elastic film 4 and break along a scribing line 11; and a lower breaking bar 5 which is arranged to enable vertical movement under the elastic film 4 and breaks along the scribing line 11. Breaking is performed in such a state that the lower breaking bar 5 and a first upper breaking bar 6a pinch the brittle material substrate 1 by pressure-contacting the lower breaking bar 5 along the scribing line 11 opposite the side at which the scribing line 11 is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
