| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polysiloxane-based negative-type radiation-sensitive composition with a sufficient resolution which is suitable to form a protective coat and an interlayer dielectric that are excellent in transparency, heat resistance (heat-resistant transparency), sensitivity, refractive index, surface hardness, scratch resistance, adhesion to an ITO transparent conductive film, and crack resistance, and to provide the protective coat and the interlayer dielectric formed of the composition, as well as to provide a method of forming the protective coat and the interlayer dielectric. <P>SOLUTION: The invention includes: [A](a1) a hydrolyzed condensate obtained by reaction between a hydrolyzable silane compound represented by the formula (1) and a hydrolyzable silane compound represented by the formula (2); [B] a radiation-sensitive acid generator or a radiation-sensitive base generator; and [C] a radiation-sensitive composition containing an alcohol solvent. <P>COPYRIGHT: (C)2012,JPO&INPIT |
